@ARTICLE{Wróbel2017:i6890,
	author="{Wróbel, Aleksander and Uznański, Paweł and Walkiewicz-Pietrzykowska, Agnieszka and Jankowski, Krzyztof}",
	title="{Amorphous silicon carbonitride thin-film coatings produced by remote nitrogen microwave plasma chemical vapour deposition using organosilicon precursor}",
	year="2017",
	type="artykuł naukowy",
	language="en",
	journal="{Applied Organometallic Chemistry}",
	issn="0268-2605",
	volume="31",
	number="12",
	doi="10.1002/aoc.3871",
	url="https://onlinelibrary.wiley.com/doi/epdf/10.1002/aoc.3871",
}
